Tegal Corporation designs, manufactures, markets and services best-of-breed Deep Reactive Ion Etching (DRIE) systems for the fabrication of advanced MEMS, power ICs and optoelectronic devices found in products like smart phones, digital cameras and imagers, and GPS units. Tegal combines proven expertise with practical system strategies to deliver application-specific DRIE solutions that are robust and reliable, and deliver exceptional process quality and high yields at a lower overall cost of ownership. Headquartered in Petaluma, California, and with a development center in Annecy, France, Tegal has more than 35 years of expertise and innovation in specialized plasma etch technologies.