AMS SMT™
Wafer Size: 100mm – 200mm
The Tegal AMS SMT™ is the standard of excellence for reactive sputtering R&D into the unique critical deposition needs of BAW (FBAR and SMR) devices.
- Unique design for repeatable and consistent reactive deposition
- Cassette-to-cassette 10 wafer handling
- Standard AMS AlN (or Mo) process module
- Optional laser interferometer
AMS SMT™ and AMS MMT™ are trademarks of Tegal Corporation