ACS™ Upgrade

Tegal offers an exclusive upgrade opportunity for our longtime customers with table top 901e, 901g, and 903e cassette-to-cassette etch systems. Replace your aging and hard-to-find 8-bit microcontroller boards with a new PC based Advanced Control System (ACS) upgrade. In addition to a new WinXP graphical user interface, you get the following feature and performance upgrades from the latest generation of Tegal 900ACS products:

• Pre-built SST table with upgrade electronics and LCD touchscreen monitor pre-installed for quick conversion in the fab
• Micro-step servo motor controllers for high precision wafer transport without tedious mechanical sensor adjustments
• High-precision, high-frequency, programmable logic controllers for realtime process control
• Virtually unlimited recipe storage
• Support for onboard data logging
• Support for SECS/GEM II factory automation
• Seven levels of user security

Here is an opportunity to extend the industry workhorse for non-critical single wafer plasma RIE for another decade of productivity. Contact your local Tegal sales or service representative for all the details.

901ACS™ and 903ACS™ are trademarks of Tegal Corporation