The Tegal Compact 360 NLD™ cluster tool is a new 300mm capable bridge tool that will serve as the introductory platform for Tegal's patented Nano-Layer Deposition process. NLD™ is a unique cyclic MOCVD process for highly conformal coatings that incorporates plasma film treatment with each deposition cycle. This offers the benefits of atomic layer deposition with the potential for much higher depositions rate. NLD also offers the benefit of utilizing common MOCVD precursor materials that are readily available for a wide variety of metal, metal oxide and metal nitride films. The Tegal Compact platform can accommodate all wafer sizes from 100mm to 300mm in one, two, or three process module configurations; with a wide variety of front end loadlock options including FOUP EFEM.

Compact 300™ Compact 360 NLD™ and NLD™ are trademarks of Tegal Corporation