With the acquisition of Alcatel MicroMachining Systems, Tegal is designing, manufacturing and selling wafer processing equipment for DRIE plasma etching.

The product range includes...

• 110 SE, a single wafer manually loaded system with one Process Module
• 200 SE, a stand-alone cassette-to-cassette system with one Process Module
• X200 SE Cluster Tools

The i-Productivity™ Process Modules have been designed to achieve a high degree of integration and maintainability. All Process Modules are equipped with a high density, low pressure ICP plasma source, high vacuum pumping system, gas box, facility panel, control and power supply rack. A choice of Mechanical or Electrostatic wafers chucks allows adapting to a wide range of wafer designs and applications.

110 SE™, 200 SE™, 3200 SE™, 4200 SE™ and i-Productivity™ are trademarks of Tegal Corporation