SYSTEM UPGRADES

System Upgrades

System upgrades are available for all Tegal product lines, which include Etch, DRIE, PVD & NLD.

Basic system upgrades are available as a result of Continuous Improvement Programs (CIP) and can reflect cost of ownership (CoO) savings and a quick return on Investment (ROI). These upgrades generally reflect better tool efficiency and reliability. Tegal upgrades will advise you, the customer, the following information to assist you in making the right decision:

• Feature, Describes the feature and purpose of the upgrade and how that upgrade would improve your system
• Benefit, Outlines the technical specifics of the capability of the upgrade
• Pricing, Identifies pricing and warranty status
• Savings, Details the ROI based on either:
• A dollar value,
• Time/hour value so that you can calculate ROI based on fab cost per hour,
• Or overall improvement that encompasses not just time and money but could also include, for example, improved diagnostics, better reporting etc.

Major system upgrades such as Tegal's Advanced Control System ( ACS ) upgrade available for all of the 900 & 980 series product line of plasma etchers. These major upgrades, whatever the system product line, include all of the above information in Features, Benefits, Pricing, and Savings and can be retrofitted at Tegal or in some cases at the customer site. These upgrades include:

• System audit to check current system revision and upgrade-ability
• Full system audit report detailing all technical specifications, possible requirements and pricing
• If a Tegal factory fitted upgrade is preferred your system will be final tested with you the customer
• If a field upgrade is preferred Tegal will:
• Advise on fab facilitization and requirements
• Complete upgrade at customers site
• Tegal re-installs the system
• Tegal tests for hardware acceptance
• Tegal performs process verification (PV)
• Release to customer production line
• Warranty as defined by the upgrade

Tegal offers a range of upgrades for our entire product line of Etch, DRIE, PVD & NLD equipment. Please contact your local regional office or Tegal Corporation in the USA with details of your requirements.