Tegal publishes technical papers and articles from time to time. Please feel free to browse these posted white papers. They can be searched by product group or text within the abstract. Some entries include full PDF documents for download and printing.
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Title (click to view)Date
Crystal Orientation and Stress in Reactively Sputtered AlN Films on Mo Electrodes 05 November 08
Tegal 2008 AlN Workshop - Requirements to Piezoelectric Thin Films for RF SAW/BAW Devices 11 June 08
Tegal 2008 AlN Workshop Agenda 11 June 08
Tegal 2008 AlN Workshop - FE Simulations of FBARs/SMRs 11 June 08
Tegal 2008 AlN Workshop - Temperature Compensated Aluminum Nitride Lamb Wave Resonators for Monolithic Frequency References 11 June 08
Tegal 2008 AlN Workshop - Stress Control in AlN and Mo Films for Electro-Acoustic Devices 11 June 08
Tegal 2008 AlN Workshop - SiP/SoC Integration of RF SAW/BAW Filters 11 June 08
PVD_SJ_2007_AlN_PVD 15 January 08
High-Adhesive Back Side Metallization of Ultrathin Wafers 18 May 07
Dry Etching of High-K Dielectric PZT Stacks 27 April 07
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